TOF-SIMS를 이용한 표면분석

Surface Analysis by Time-Of-Flight Secondary Ion Mass Spectrometry(TOF-SIMS)

  • 이연희 (한국과학기술원 특성분석센터) ;
  • 한승희 (한국과학기술원 특성분석센터)
  • Lee, Yeonhee (Advanced Analysis Center, Korea Institute of Science &Technology) ;
  • Han, Seunghee (Advanced Analysis Center, Korea Institute of Science &Technology)
  • 발행 : 1997.10.25