A Quantitative Analysis on Human Errors in Shifting Hazardous Materials of Semiconductor Plants

반도체공장의 위험물 교체작업시 인적과오에 대한 정량적 분석

Most plants producing semiconductors use a lot of chemicals, hazardous materials, and explosive gases. Though those materials are hazardous too much, some works still have to be done manually by human workers. However, according to a historical survey, more than half industrial accidents of those plants resulted from human errors or malfunctions. Thus, this research aimed 1) to diagnose shifting hazardous materials of semiconductor plants, 2) to estimate failure probability of human workers through human reliability analysis, and 3) to find out the tasks on which educational emphasis should be put. Through personal interview and visiting working spots, shifting tasks were analyzed, and modelled into a 24-step work, and after that, THERP and ETA was applied. During the shifting work, estimated human failure probability under the assumption of independency, 2.3004E-05, underestimated that probability 8. l008E-05 which could be calculated under the assumption of dependency. And this analysis showed that gas leakage from an old cylinder occupies 78.27% in the case of independent failures whereas gas leakage from a new cylinder occupies 75.06% in the case of dependent failures. So it was concluded that dependency assumption may gloss real situations. In addition, confirming gauge of regulators and closing valves turned out to be the most important tasks than purge tasks.