E2M - 전기 전자와 첨단 소재 (Electrical & Electronic Materials)
- 제10권8호
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- Pages.813-818
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- 1997
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
습식 식각법으로 제조된 박막 인덕터의 임피턴스 특성
Impedance Properties of Thin Film Inductors by Fabricated Wet Etching Method
초록
In this study the thin film air core and magnetic core inductors consisting of planar coil and/or CoNbZr amorphous magnetic layers on a Si substrate were fabricated as spiral type by using rf magnetron sputtering and wet etching methods. The etchant solution was achieved by iron chloride solution(17.5 mol%) mixed with HF (20 mol%) during 150 sec which etched Cu films and CoNbZr/Cu/CoNbZr multi-layer films. They were about 10
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