Thermal Annealing Effects on the Structural and Optical Properties of Sputtered TiO$_2$ Films

스퍼터링 TiO$_2$막의 구조 및 광학적 성질에 미치는 열처리 효과

The effects of the post-deposition annealing on the structural optical properties of sputtered $TiO_2$ thin films were studied; annealing was carried out in air up to $1000^{\circ}C$ for different duration. The results of the X-ray diffraction and the raman spectroscopy showed the annealing-condition dependent structural transformation of $TiO_2$ films from the as-deposited amorphous phase to the anatase and rutil phases. The spectroscopic elliposometry was used to investigate the deposition-condition dependence of the as-deposted films optical constants and also the evolution of the optical constants correlated with the annealing-induced structural transformation.