Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
권호 표지

INVESTIGATION OF MULTI-ARC PLASMA PLATING FILM EQUIPMENT BULAT-6 AND ITS TECHNICAL CHARACTERISTICS

  • Wen Xueya (State Key Lab. of Surface Modification by Beam Three Dalian University of Technology Dalian) ;
  • Ma Te2ngcai (State Key Lab of Suface Modification by Beam Three Dalian university of Technology) ;
  • Hu Shejun (Department of Material Science Guangdong University fo Technology Guangzhou P. R. China)
  • Published : 1997.10.01
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Abstract

In this paper multi-arc plasma plating film equipment Bulat-6 and its technical characteristics were analyzed in detail. This machine is the first of its kind in China. Influential factors and reducing methods on microdroplets of titanium were investigated. By method of electromagnetic field control and ion beam enhanced deposition excellent titanium nitride film could be obtained. Bicrohardness and adhesion were 250Mpa and 6.5Kg respectively.

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