한국진공학회지 (Journal of the Korean Vacuum Society)
- 제6권S1호
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- Pages.110-114
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- 1997
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- 1225-8822(pISSN)
ION BEAM AND ITS APPLICATIONS
- Koh, S.K. (Thin Film Technology Research Center Korea Institute of Science and Technology) ;
- Choi, S.C. (Thin Film Technology Research Center Korea Institute of Science and Technology) ;
- Kim, K.H. (Thin Film Technology Research Center Korea Institute of Science and Technology) ;
- Cho, J.S. (Thin Film Technology Research Center Korea Institute of Science and Technology) ;
- Choi, W.K. (Thin Film Technology Research Center Korea Institute of Science and Technology) ;
- Yoon, Y.S. (Thin Film Technology Research Center Korea Institute of Science and Technology) ;
- Jung, H.J. (Thin Film Technology Research Center Korea Institute of Science and Technology)
- 발행 : 1997.10.01
초록
Development of metal ion source growth of high quality Cu metal film formation of non-stoichiometric
키워드