초록
A circuit model for a field emission triode has been proposed. The model parameters have been extracted from he fabricated silicon tip array and verified by comparing with the results simulated by circuit simulator(SPICE). The cut-off frequency can be calculated from the parametric capacitance and the transconductance values extracted from measurements. For the field emission triode, the capacitance of 3.45fF/tip and the transconductance of 0.94nS/tip have been measured under the emission current of 4.1nA/tip. From these values, the cut-off frequency is predicted to be 43 kHz but th measured one came out to be 6 kHz. because o the parasitic capacitance components.