The Journal of Korean Institute of Electromagnetic Engineering and Science (한국전자파학회논문지)

The Korean Institute of Electromagnetic Engineering and Science (한국전자파학회)
권호 표지

A Stydy on the Development of 800 MHz band Pass Fiters using Polycrystal AIN Film

다결정 AIN 박막을 이용한 800 MHz 대 표면탄성파 대역통과 필터개발에 관한 연구

  • 이형규 (충북대학교 전기전자공학부) ;
  • 최익권 (충북대학교 전기전자공학부) ;
  • 용윤중 (한국과학기술원 재료공학과) ;
  • 이재영 (한국과학기술원 재료공학과)
  • Published : 1997.08.01
Download PDF
⟨ Previous Next ⟩

Abstract

We present the results on the applicability of the polycrystalline AIN thin films for a surface acoustic wave filter operating at 800 MHz frequency. The films show the FWHM of 3 .deg. from th X-ray rocking curve, which indicates that the c-axis of the films is pre- ferentially oriented along the growth direction. The fabricated band pass filters exhibit the center frequency of 865 MHz with 3dB band-width of 45 MHz. From the measured frequency response, the electro-mechanical coupling constant of 0.8% and the SAW velocity of 5,709 m/s are obtained. Thus, we conclude that the sputtered AIN films are feasible for the fabrication of uper UHF band SAW filters.

본 논문에서는 다결정 AlN 박막을 이용하여 800 MHz 대역의 표면탄성파 펼터를 시험제작한 연구 결과를 제시한다. 고주파 스퍼터링 방법에 의하여 실리콘 기판위에 증착시켜 X선 rocking curve의 반치폭이 $3^{\circ}$이고 박막 성장 방향으로 결정의 c축이 우선 배향된 박막을 얻었다. 임펄수 모텔링 기법을 이용하여 시험제작된 표면탄성파 필터는 중심주파수 865 MHz, 3 dB 대역폭 45 MHz이며 측정된 주파수 응답곡선으로부터 유도된 전기기계 결합상수는 0.8 %, 표면탄성파 전달속도는 5,709 m/s이다.

Keywords

References

  1. Proc. Int. Symp. SAW Devices for Mobile Comm. Nanometer fabrication processing technology and GHZ-range unidirectional low-loss SAW filters Kazuhiko Yamanouchi
  2. Handbook of Sputter Deposition Technology K. Wasa;S. Hayakawa
  3. Proc. of the IEEE v.77 no.10 Applications of surface acoustic and shallow bulk acoustic wave devices Colin K. Campbell
  4. IEEE Trans on Ultra, Ferroelectrics, and Frequency Control v.UFFC-33 no.3 High-coupling and high-velocity SAW using ZnO and AIN films on a glass substrate Tadashi Shiosaki;Yasuki Mikamura;Fumio Takeda;Akira Kawabata
  5. IEEE Trans on Ultra, Ferroelectrics, and Frequency Control v.UFFC-42 Theoretical study on SAW characteristics of layered strutures including a diamond layer H. Nakahata;A. Hachigo;K. Higaki;S. Fujui;S. Shikata;N. Fujimori
  6. J. Vac. Sci. Tech. Characteristics of the hydrogenated aluminum nitride(AIN:H) films prepared by RF reactive sputtering and their application to surface acoustic wave (SAW) devices Yoon-Joong Yong;Jai-Young Lee
  7. IEEE Trans. on Sonics and Ultrasonics v.SU-32 no.5 Zero-temperature-coefficient SAW devices on AIN epitaxial films Kazuo Tsubouchi;Nobuo Mikoshiba
  8. Jpn. J. Appl. Phys. v.33 no.5B Characteristics of AIN thin films deposited by electron cyclotron resonance dual-ion-beam sputtering and their application to GHz-band surface acoustic wave devices H. Okano;N. Tanaka;Y. Hirao;Y. Kobayashi;K. Shibata;S. Nakano
  9. Jpn. J. Appl. Phys. v.31 no.10 Preparation of c-axis oriented AIN thin films by low-temperature reactive sputtering Horoshi Okano;Yusuke Takahashi;Toshiharu Tanaka;Kenichi Shibata;Stoichi Nakano
  10. Appl. Phys. Lett. v.36 no.8 Low-temperature growth of piezoelectric AIN films by rf reactive planar magnetron sputtering T. Shiosaki;T. Yamamoto;T. Oda;A. Kawabata
  11. IEEE Trans on Microwave Theory and Techniques v.MTT-21 no.4 Impulse model design of acoustic surface-wave filters Clinton S. Hartmann;DeLamar T. Bell, Jr.;Ronald C. Rosenfeld
  12. Digital Signal Processing William D. Stanley
  13. IEEE MTT-S Digest Design and performance of wide-band IIDT-type SAW filters with low loss and improved sidelobe suppression R. Weigel;B. Bader;G. Fischerauer;P. Russer
  14. IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control v.41 no.3 Equivalent networks for SAW interdigital transducers Kiyoshi Inagawa;Masanori Koshiba
  15. IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control v.36 no.1 A theoretical and experimental study of low-loss SAW filters with interdigitated interdigital transducers Peter M. Smith;C. K. Campbell