E2M - 전기 전자와 첨단 소재 (Electrical & Electronic Materials)
- 제10권2호
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- Pages.126-133
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- 1997
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
Magnetron sputtering으로 증착한 ZnO 박막의 특성과 열처리에 따른 비저항과 미세구조
A properties of ZnO thin film deposited by magnetron sputtering and its resistivity and microstructure due to annealing
초록
In order to apply for the gas sensing layer and the piezoelectric thin film devices, we studied the effects of magnetron sputtering conditions and annealing temperature on the electrical and structual characteristics of the ZnO thin film. The optimal deposition conditions, in order to obtain a c axis of the ZnO (002) phase thin film which is perpendicular to SiO