The Korean Journal of Ceramics

The Korean Ceramic Society (한국세라믹학회)
권호 표지

Preparation of Highly Oriented ZnO Thin Films Prepared by Sol-Gel Method

  • Cheol Jeong (Department of Ceramic Engineering, Chonnam National University) ;
  • Hwang, Kyu-Seog (Department of Ceramic Engineering, Chonnam National University) ;
  • Moon, Jong-Ha (Department of Ceramic Engineering, Chonnam National University) ;
  • Kim, Byung-Hoon (Department of Ceramic Engineering, Chonnam National University)
  • Published : 1997.12.01
Download PDF
⟨ Previous Next ⟩

Abstract

Highly oriented ZnO thin films were fabricated by dip-coating technique using zinc acetate 2-methoxyethanol 2-aminoethanol solution as starting materials, and effects of substrates on the film's orientation were investigated. Product films were obtained by prefiring at 300, 400, 500 and 550℃ for 10 min, followed by final heat-treatment at the same temperatures as prefiring for 1h. c-axis oriented films on glass substrates were prepared by heat treatment of prefiring films at 300-550℃, while films on alumina showed polycrystalline structure. Films with c-axis orientation exhibited lower specific resistivities than those of polycrystalline films with partial crack and pore.

Keywords

References

  1. J. Am. Ceram. Soc. v.73 Application of Zinc Oxide Variastors T.K. Gupta
  2. J. Matter. Sci. v.25 Low-Temperature Sintering of Zinc Oxide Varistors M.N. Rahaman;L.C. De Jonghe;J.A. Voigt;B.A. Tuttle
  3. J. Am. Ceram. Soc. v.73 Grain Size Control in Low-Voltage Varistors D.F.K. Hennings;R. Hartung;P.J.L. Reijnen
  4. Ceramic Bull. v.69 Thin Film ZnO- Properties and Applications F.C.M. Van De Pol
  5. Thin Soild Films v.137 ZnO Processing for Integrated Optic Sensors W.H.G. Horsthuis
  6. Thin Solid Films v.121 Adsorption, Desorption and Conductivity of Sputtered Zinc Oxide Thin Films T.L. Tansley;D.F. Neeley
  7. J. Mater. Sci. Lett. v.11 Oxygen-Sensing Properties of Sputtered ZnO Film Deposited on Sapphitr under Ultra-Violet Illumination S. Matsushima;K. Abe;K. KObayashi;G. Okada
  8. J. Appl. Phys. v.51 Structures and SAW propertied of rf-Sputtered Single-Crystal Films of ZnO on Sapphire T. Mitsuyu;S. Ono;K. Wasa
  9. J. Appl. Phys. v.64 Optical Properties of Sputter-Deposited ZnO:Al Thin Films Z.C. Jin;I. Hamberg;C.G. Granqvist
  10. J. Mater. Sci. Lett. v.11 Zinc Oxide Thin Films Prepared by Chemical Vapor Deposition from Zinc Acetate T. Maruyama;J. Shionoya
  11. J. Ceram. Soc. Jpn. v.104 Preparation of ZnO Films with Preperential Orientation by Sol-Gel Method M. Ohyama;H. Kozuka;T. Yoko;S. Sakka
  12. Thin Solid Films v.306 Sol-Gel Preparation of ZnO Films with Extremely Preferred Orientation along (002) Plane from Zinc Acetate Solution M. Ohyama;H. Kozuka;T. Yoko
  13. Jpn. J. Appl. Phys. v.33 Photoconductivity of Ultrathin Zinc Oxide Films Y. Takahashi;M. Kanamori;A. Kondoh;H. Minoura;Y. Ohya
  14. Thin Solid Films v.108 Highly Transparent and Conducting Indium-Doped Zinc Oxide Films by Spary Pyrolysis S. Major;A. Banerhee;K.L. Chopra