Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
권호 표지

Simultaneous measurement of in-plane and out-of-plane displacement using holographic interferometry

홀로그래피 간섭계를 이용한 횡변위와 종변위의 동시 측정

  • 김달우 (포항산업과학연구원 계측연구팀) ;
  • 임부빈 (포항공과대학 물리학과)
  • Published : 1997.08.01
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Abstract

We set up a four-wave holographic interferometer using a symmetric dual-beam illumination which is to measure in-plane and out-of-plane displacement simultaneously. In order to acquire the displacement phase map we applied the phase-shifting method and removed the noise of the phase map with least-squares fitting. In this approach the access to information relative to both the difference and sum of phases existing in the two arms of four-wave holographic interferometer was allowed. As a result, in-plane and out-of-plane displacement was measured to the accuracy of λ/40 and λ/100, respectively at λ=632.8nm

서로 대칭되는 이중 조명을 이용한 홀로그래피 네파간섭계를 구성하여 횡변위와 종변위를 동시에 측정하였다. 물체파와 재생파의 간섭을 일으킨 후 위상이동법으로 변위위상도를 작성하였으며 최소제곱법맞춤으로 위상도의 잡음을 제거하였다. 이러한 방법으로 네파간섭계의 두 광로에 존재하는 위성의 차와 합에 대한 정보를 구하였으며, 파장 632.8 nm인 헬륨-네온 레이저 광선에 대하여 종변위와 횡변위는 각각 정밀도 .lambda./40 및 .lambda./100 이내로 측정되었다.

Keywords

References

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