A new lumped equivalent circuits for spiral inductor with metal thickness

금속의 두께를 고려한 나선형 인덕터의 집중형 등가 회로의 제안

Square spiral inductors are designed with EM program in accordance with the inner diameter and the metal thickness which is 0.2.mu.m and 20.mu.m respectively. We propose a parameter extraction method based on the S-parameter. Lumped equivalent circuits of spiral inductors are analyed with reflection coefficient S$_{11}$, of witch freqency rnage is 1~10GHz. When metal thickness is 0.2.mu.m, S$_{11}$ with EM simulation is not the same as S$_{11}$ that of SPICE simulation. So we suggests a new lumped equivalent circuits which compensate circuits. Te new lumped equivalent circuits are adequate for other inductor with small scale at high frequencies.ncies.