참고문헌
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- MRS Symp. Proc. v.381 H.Kudo;R.Shinohara;M.Yamada
- IEEE Trans. Electron devices v.40 no.1 T.Sakurai
- Solid State Technology v.38 no.7 N.H.Hendricks
- MRS Symp. Proc. v.381 N.H.Hendricks;K.S.Y.Lau;A.Smith;W.B.Wan
- Proc. of VMIC T.Furusawa;Y.Homma;Y.Shimomura;H.Morishima;Y.Yamamoto;H.Satoh
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- MRS Symp. Proc. v.381 L.W.Hrubesh
- MRS Symp. Proc. v.381 C.H.Ting;T.E.Seidel
- State-of-the-art seminar T.E.Wabe
- MRS Symp. Proc. v.381 K.R. Carter;H.J.Cha;R.A.Dipietro;C.J. Hawker;J.L.Hedrick;J.W.Labadie;J.E.Mcgrath;T.P.Russell;M.I.Sanchez;S.A.Swanson;W.Volkse;D.Y.Yoon
- Low dielectric constant materials for deep submicron interconnections applications MRS 96 Fall Meeting Tutorials J.Leu;T.-M. Lu;P.S.Ho