Journal of Sensor Science and Technology (센서학회지)
- Volume 6 Issue 5
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- Pages.414-422
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- 1997
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Electrical and Optical Properties of CdS Thin Films Deposited by CSVT Method
CSVT법으로 제조된 CdS박막의 전기적 및 광학적 특성
- Park, Ki-Cheol (Division of Electrical and Electronic Engineering and Research Center for Aircraft Parts Technology, Gyeongsang Nat'l University) ;
- Shim, Ho-Seob (Division of Electrical and Electronic Engineering and Research Center for Aircraft Parts Technology, Gyeongsang Nat'l University)
- Published : 1997.09.30
Abstract
CdS thin films with low resistivity and adequate transmittance in the visible region for the window of CdS/CdTe hetero junction solar cel1 were prepared by close spaced vapor transport(CSVT) method. The electrical and optical properties of the CdS thin films were investigated in terms of the deposition conditions, such as the substrate temperature, the working pressure, and the source temperature. The substrate temperature, the working pressure, and the source temperature for the optimum deposition of the CdS thin films were
CSVT(close spaced vapor transport)법으로 CdS/CdTe 이종접합 태양전지의 창재에 적합한 낮은 비저항과 적절한 광투과도를 갖는 CdS막을 증착하였다. 기판온도, 분위기압, 소스온도 등의 증착조건에 따른 CdS막의 전기적 및 광학적 특성을 조사하였다. 최적 증착조건은 기판온도
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