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The Polymer Society of Korea
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Polymer Science and Technology
(한국고분자학회지:고분자과학과기술)
Volume 7 Issue 6
/
Pages.716-724
/
1996
/
1225-0260(pISSN)
/
2586-1476(eISSN)
The Polymer Society of Korea (한국고분자학회)
Chemical Materials and Lithography Process for Semiconductor
반도체용 화학재료 및 패턴형성 공정
Choi, Sang Jun
;
Park, Chun Geun
최상준
(삼성전자반도체연구소) ;
박춘근
(삼성전자반도체연구소)
Published : 1996.12.30
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