직접질화법에 의한 (Ti,Al)N계 복합질화물의 합성(II)

Synthesis of (Ti,Al)N Powder by the Direct Nitridation(II)

  • 조영수 (한국자원재생공사 기술연구부) ;
  • 이영기 (위덕대학교 전자재료공학과) ;
  • 손용운 (한국자원연구소 자원활용소재부) ;
  • 박경호 (한국자원연구소 자원활용소재부) ;
  • 김석윤 (홍익대학교 공과대학 금속공학과)
  • 발행 : 1996.09.30

초록

The purpose of this research is to develop the technology for the synthesis of (Ti,Al)N powder, which shows simultaneously the excellent properties of TiN and AlN, from the Ti-Al intermetallic compounds by the direct nitriding method. The effects of variables such as temperature, Ti-Al intermetallic compounds ($TiAl_3$, TiAl and $Ti_3Al$) were investigated by TG, XRD and SEM. The (Ti,Al)N powder can be easily synthesized from the intermetallic compounds by the direct nitriding method. Among the intermetallic compounds, the nitriding behavior increased with TiAl> $Ti_3Al$ > $TiAl_3$, as the difference of diffusion coefficient for nitrogen in each materials. The ternary nitride such as $Ti_2AlN$ and $Ti_3Al_2N_2$ can be synthesized by the direct nitriding method, although the ternary nitride coexist with TiN and AlN. The ternary nitrides are stable below $1400^{\circ}C$, but these are gradually decomposed into TiN and AlN above $1400^{\circ}C$.

키워드