Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 29 Issue 6
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- Pages.683-690
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- 1996
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
MO-COMPOUNDS AS A DIFFUSION BARRIER BETWEEN Cu AND Si
- Kim, Ji-Hyung (Department of Materials Engineering, Sungkyunkwan University) ;
- Lee, Yong-Hyuk (Department of Physics, Sungkyunkwan University) ;
- Kwon, Yong-Sung (Department of Physics, Sungkyunkwan University) ;
- Yeom, Geun-Young (Department of Materials Engineering, Sungkyunkwan University) ;
- Song, Jong-Han (Korea Institute of Science and Technology)
- Published : 1996.12.01
Abstract
In this study, the diffusion barrier properties of
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