한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제29권6호
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- Pages.683-690
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- 1996
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
MO-COMPOUNDS AS A DIFFUSION BARRIER BETWEEN Cu AND Si
- Kim, Ji-Hyung (Department of Materials Engineering, Sungkyunkwan University) ;
- Lee, Yong-Hyuk (Department of Physics, Sungkyunkwan University) ;
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Kwon, Yong-Sung
(Department of Physics, Sungkyunkwan University) ;
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Yeom, Geun-Young
(Department of Materials Engineering, Sungkyunkwan University) ;
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Song, Jong-Han
(Korea Institute of Science and Technology)
- 발행 : 1996.12.01
초록
In this study, the diffusion barrier properties of
키워드