Journal of the Korean institute of surface engineering (한국표면공학회지)
- Volume 29 Issue 5
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- Pages.525-531
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- 1996
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
CRYSTALLINE PHASES AND HARDNESS OF (Ti$_{1-x}$ Al$_{x}$ )N COATINGS DEPOSITED BY REACTIVE SPUTTERING
- Park, Chong-Kwan (Department of Metallurgy and Materials Science, Hong Ik University) ;
- Park, Joo-Dong (Department of Metallurgy and Materials Science, Hong Ik University) ;
- Oh, Tae-Sung (Department of Metallurgy and Materials Science, Hong Ik University)
- Published : 1996.10.01
Abstract
(Ti1-xAlx)N films were deposited on high speed steel and silicon substrates by reactive sputtering in mixed
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