한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제29권5호
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- Pages.363-370
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- 1996
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
SYNTHESIS OF CARBON NITRIDE THIN FILMS BY PLASMA PROCESSING
- Takai, Osamu (Department of Materials Processing Engineering, Nagoya University) ;
- Taki, Yusuke (Department of Materials Processing Engineering, Nagoya University) ;
- Kitagawa, Toshihisa (Department of Materials Processing Engineering, Nagoya University)
- 발행 : 1996.10.01
초록
Carbon nitride is one of the new carbon materials which show interesting properties. After the theoretical calculation by LIu and Cohen, many researchers are trying to prepare
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