한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제29권4호
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- Pages.261-267
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- 1996
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
D. C. 마그네트론 스퍼터링에 의한 증착조건이 TiN다층박막의 밀착력에 미치는 영향
The effect of deposition conditions on the adhesion strength of TiN multilayer by D. C. magnetron sputtering
초록
The characteristics and adhesion strength of TiN layer deposited by D. C. magnetron sputtering were investigated. Three types of TiN layers were deposited on STS304 stainless steel. Scratch tests were performed to determine the effect of deposition temperature, the thickness of coated TiN layer and the titanium inter-layer on the adhesion strength. TiN multilayer with titanium inter-layer showed the highest critical load in the deposition temperature range of
키워드