Characteristics of Display -type Spherical Mirror Analyzer

평면 표시형 구면경분석기의 분광 특성

  • ;
  • A.kurokawa ;
  • S.Ichimura ;
  • J. Toth ;
  • K.Yoshihara ;
  • 정재인 (산업과학기술연구소 자동화부문) ;
  • ;
  • ;
  • ;
  • ;
  • 이영백 (선문대학교 물리학과)
  • Published : 1996.09.01

Abstract

A new display -type spherical mirror analyzer has been characterized in terms of the performance and the auger spectra taken by using it. The final goal with the analyzer is to devleop SET(Surface Electron Spectroscopic Tomography) which is capable to provide a 3-dimensional layer-by-layer information nondestructively. This kind of analyzer was originally designed by H.Daimon. The main feature is to display 2-dimensional electronic structures directly onto a screen. In our case, an external micro-electron beam was employed as an excitation source. However, this invokes various problems because of the interference between the electron beam and the analyzer. The problems have been solved through the optimization of various parameters of the analyzer.

Keywords

References

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