레이저 어블레이션에 의해 증착된 비정질 다이아몬드 박막의 결합및 물리적 특성

Bonding and Physical Characteristics of Diamond-like Carbon Films Prepared by Laser Ablation

  • 박환태 (전북대학교 자연과학 대학 물리기술학부) ;
  • 홍영규 (전북대학교 자연과학 대학 물리기술학부) ;
  • 김재기 (국방과학연구소) ;
  • 김진승 (전북대학교 자연과학 대학 물리기술학부) ;
  • 박찬 (전북대학교 자연과학 대학 물리기술학부)
  • Park, Hwan-Tae (School of Physics and Technology, Chonbuk National University) ;
  • Hong, Young-Kyu (School of Physics and Technology, Chonbuk National University) ;
  • Kim, Jae-Ki (Agency for Defense Development) ;
  • Kim, Jin-Seung (School of Physics and Technology, Chonbuk National University) ;
  • Park, Chan (School of Physics and Technology, Chonbuk National University)
  • 발행 : 1996.03.01

초록

Noncrystalline films of diamond-like carbon (DLC) have been prepared by laser ablation technique at room temperature. A Q-switched Nd-YAG laser beam with wavelength of 1064 nm and pulse duration of 10 ns was focused onto a graphite target with power densities of about $10^9 W/\textrm{cm}^2$. The physical properties of the resulting films were analyzed with density, hardness, and resistivity measurements. The surface and bonding structure were investigated by atomic force microscopy (AFM), Raman spectroscopy, electron energy loss spectroscopy (EELS).

키워드

참고문헌

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