Journal of the Korean Magnetics Society (한국자기학회지)
- Volume 6 Issue 5
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- Pages.317-322
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- 1996
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- 1598-5385(pISSN)
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- 2233-6648(eISSN)
Magnetic Properties of Fe-Zr-N Soft Magnetic Thin Films
Fe-Zr-N 연자성 박막의 자기적 성질
Abstract
Thin films of Fe-Zr-N were fabricated by rf magnetron reactive sputtering method. The saturation magnetization and coercivity as functions of annealing temperature and partial pressure of nitrogen gas, effective permeability at high frequencies, and thermal stability were investigated. Magnetic softness was exhibited in the composition range of
RF magnetron reactive sputtering 법으로 Fe-Zr-N 박막을 제작하여 열처리 온도와 질소 분압의 변화에 따른 포화자화, 보자력, 고주파에서의 투자율 그리고 열적 안정성을 조사하였다. Fe-Zr-N 박막은 비정질과 결정질의 경계 조성인
Keywords