Abstract
This paper describes a new automated simulation system for micromachines whose size range $10^{-6}$ to $10^{-3}$ m. An automic finite element (FE) mesh generation technique, which is bases on the fuzzy knowledge processing and computation al geometry technique, is incorporated into the system, together with one of commerical FE analysis codes, MARC ,and one of commerical solid modelers, Designbase. The system allows a geometry model of concern to be automatically converted to different FE models, depending on physical phenomena of micromachines to be analyzed , i,e. electrostatic analysis, stress analysis, modal analysis and so on. The FEmodels are then automatically analyzed using the FE analysis code, Among a whole process of analysis, the definition of a geometry model, the designation of local node patterns and the assignment of material properties and boundary conditions onto the geometry model are only the interactive process to be done by a user. The interactive operations can be processed in a few minutes. The other processes which are time consuming and labour-intensive in conventional CAE systems are fully automatically performed in a popular engineering workstation environment. This automated simulation system is successfully applied to evaluate an electrostatic micro wobble actuator.
