Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Chemcial Analysis of Sol-Gel Derived $pbTiO_3$ Thin Film

$pbTiO_3$ 졸-겔 박막의 화학분석

  • 김승현 (한국과학기술연구원 세라믹스연구부) ;
  • 김창은 (연세대학교 세라믹공학과) ;
  • 심인보 (한국과학기술연구원 세라믹스연구부) ;
  • 오영제 (한국과학기술연구원 세라믹스연구부)
  • Published : 1996.06.01
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Abstract

A Sol-gel derived ferroelectric PbTiO3 thin film was synthesized by using diethanolamine (DEA) as a comple-xing agent. Surface chemical analyses were examined in order to study the effect of heating temperature on the composition of thin film by EPMA and XPS. A rapid volatilization of lead was observed in the films fired at $700^{\circ}C$ or higher and the ratio of Pb:Ti was found to be 34:66. A depth profile by Ar+ showed that the Ar sputtering decreased Pb amount of inner part of the film resulting in Ti-rich phase near the surface of the film.

Keywords

References

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