전자공학회논문지A (Journal of the Korean Institute of Telematics and Electronics A)
- 제33A권11호
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- Pages.97-104
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- 1996
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- 1016-135X(pISSN)
전력 트랜지스터의 특성에 미치는 다이아몬드상 카본 passivation 막의 효과
Effect of diamond-like carbon film as passivation layer on characteristics of power transistor
- Park, Jung-Ho (Dept. of Elec. Eng., Korea Univ.) ;
- Lim, Dae-Soon (Dept. of Material Sci & Eng., Korea Univ.) ;
- Jung, Suk-Koo (Dept. of Elec. Eng., Korea Univ.) ;
- Chang, Hoon (Dept. of Elec. Eng., Korea Univ.) ;
- Shin, Jong-Han (Dept. of Material Sci & Eng., Korea Univ.)
- 발행 : 1996.11.01
초록
Because of the novel characteristics such as chemical stability, hardness, electrical resistivity and thermal conductance, diamond-like carbon (DLC) film is a suitable materials for the passivation layers. For this purpose, DLC films are synthesized under various conditions and are characterized. Adhesive stregth is excellent and increased with the increase of the hydrogen gas flow rate. The resistivity of approximately 5.3X10
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