Journal of the Korean Institute of Telematics and Electronics A (전자공학회논문지A)
- Volume 33A Issue 11
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- Pages.97-104
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- 1996
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- 1016-135X(pISSN)
Effect of diamond-like carbon film as passivation layer on characteristics of power transistor
전력 트랜지스터의 특성에 미치는 다이아몬드상 카본 passivation 막의 효과
- Park, Jung-Ho (Dept. of Elec. Eng., Korea Univ.) ;
- Lim, Dae-Soon (Dept. of Material Sci & Eng., Korea Univ.) ;
- Jung, Suk-Koo (Dept. of Elec. Eng., Korea Univ.) ;
- Chang, Hoon (Dept. of Elec. Eng., Korea Univ.) ;
- Shin, Jong-Han (Dept. of Material Sci & Eng., Korea Univ.)
- Published : 1996.11.01
Abstract
Because of the novel characteristics such as chemical stability, hardness, electrical resistivity and thermal conductance, diamond-like carbon (DLC) film is a suitable materials for the passivation layers. For this purpose, DLC films are synthesized under various conditions and are characterized. Adhesive stregth is excellent and increased with the increase of the hydrogen gas flow rate. The resistivity of approximately 5.3X10
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