전자공학회논문지A (Journal of the Korean Institute of Telematics and Electronics A)
- 제33A권6호
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- Pages.136-143
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- 1996
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- 1016-135X(pISSN)
다수의 전계제한링을 갖는 planar소자의 해석적 모델
An analytic model for planar devices with multiple floating rings
초록
A simple analytic model for the planar junctions with multiple foating field limiting rings(FLR) is presented which yields analytic expressions for the breakdown voltage and optimum ring spacings. the normalized potential of each ring is derived as a function of the normalized depletion width and the ring spacing. Based on the assumption that the breakdwon occurs simulataneously at cylindrical junctions of FLR structure where the peak sruface electric fields are equal, the optimum ring spacings are determined. The resutls are in good agreement with the simulations obtained from two dimensional device simulation program MEDICI and with the experimental data reported. The normalized experessions allow a calculation of breakdown voltage and optimum spacing over a broad range of junction depth and background doping levels.
키워드