전자공학회논문지A (Journal of the Korean Institute of Telematics and Electronics A)
- 제33A권6호
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- Pages.127-135
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- 1996
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- 1016-135X(pISSN)
Pt/Ti 발열체가 내장된 TMA 가스 측정용 ZnO 박막 가스 센서
ZnO thin film Gas sensors for detection of TMA gas with Pt/Ti thin film heater
초록
To increase the sensitivity and the selectivity of the sensors to TMA gas, the composition ratio and the growth conditions of the ZnO films are studied. Annealing of the ZnO films in the various time ranges and temperatures in the oxygen is carried out to enhance the stbility of the electrical resistance. Pt/Ti heater deposited on backside of the substrates in used to control the operating temperature of th esensor. The ZnO thin film sensors doped to 4.0 wt%
키워드