Journal of the Korean Institute of Telematics and Electronics A (전자공학회논문지A)
- Volume 33A Issue 5
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- Pages.108-116
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- 1996
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- 1016-135X(pISSN)
Development of integrated TCAD for VLSI process simulation
반도체 공정 시뮬레이션을 위한 통합 TCAD 개발
Abstract
A semiconductor process imulator operated in windows
Keywords