센서학회지 (Journal of Sensor Science and Technology)
- 제5권4호
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- Pages.1-7
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- 1996
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
광학적 신호감지의 유전박막 다이아프레임을 이용하는 압력센서
Thin dielectric diaphragm pressure sensor with optical readout
- 김명규 (경북대학교 전자전기공학부) ;
- 유양욱 (경북대학교 전자전기공학부) ;
- 박동수 (경북대학교 전자전기공학부) ;
- 김진섭 (인제대학교 전자공학과) ;
- 이정희 (경북대학교 전자전기공학부) ;
- 손병기 (경북대학교 전자전기공학부)
- Kim, Myung-Gyoo (School of Electronic & Electrical Engineering, Kyungpook Nat'l Univ.) ;
- Ryu, Yang-Woog (School of Electronic & Electrical Engineering, Kyungpook Nat'l Univ.) ;
- Park, Dong-Soo (School of Electronic & Electrical Engineering, Kyungpook Nat'l Univ.) ;
- Kim, Jin-Sup (Dept. of Electronic Engineering, Inje Univ.) ;
- Lee, Jung-Hee (School of Electronic & Electrical Engineering, Kyungpook Nat'l Univ.) ;
- Sohn, Byung-Ki (School of Electronic & Electrical Engineering, Kyungpook Nat'l Univ.)
- 발행 : 1996.07.31
초록
실리콘 미세가공 기술로 약
Optical intensity-type pressure sensor was fabricated by coupling optical fiber with a micromachined thin dielectric diaphragm, which consists of a 300 nm thick
키워드