연구논문집

Korea Institute of Machinery & Materials (한국기계연구원)
권호 표지

Study on the Application of Exicimer Laser(1)

엑사이머 레이저 응용 기술에 관한 연구(I)

  • 황경현 (한국기계연구원 자동화연구부) ;
  • 윤경구 (한국기계연구원 자동화연구부) ;
  • 이성국 (한국기계연구원 자동화연구부) ;
  • Published : 1995.12.31
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Abstract

The aim of this project is the development of technology of production of micro mechanical parts. Materials are Cr, pt or film (thickness $1000-3000\AA$) on glass substrate. Method of manufacturing is resistless direct laser ablation based on the projection technology. A source of radiation is KrF excimer laser(248nm), Experiments of threshold energy are carried out and the results are analyzed by SEM.

Keywords