Applied Microscopy
- 제25권1호
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- Pages.130-138
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- 1995
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- 2287-5123(pISSN)
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- 2287-4445(eISSN)
폴리이미드박막내에 석출된 구리산화물 관찰을 위한 TEM 시편 제조와 구리산화물 분석
TEM specimen preparation for observation of Cu oxides precipitated in the polyimide film and characterization of Cu oxide particles
- You, Young-Sek (Dept. of Materials Engineering, Hanyang University) ;
- Kim, Young-Ho (Dept. of Materials Engineering, Hanyang University)
- 발행 : 1995.03.01
초록
TEM specimen preparation methods have been examined to characterize Cu oxide particles in the polyimide film. Polyimide films were prepared by coating polyamic acid onto Cu films which had been deposited on TEM-mask and glass substrates and Cu foil, followed by thermal curing. In case of TEM-mask, direct observation was possible without further preparation. In other cases, TEM specimen were made by separating polyimide film from the substrate. Polyimide films were removed from glass and Cu foil by dissolving glass in HF solution and Cu foil in
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