초록
Au/Si(100) Schotty diode를 l00k~300k 온도범위에서 current voltage(I-V), capacitance-voltage(C-V)측정을 하였다. 얻어진 Schottky barrier height(SBH)갑은 실온에서 두측정값 모두 (0.79$\pm$0.02)eV 이다. 그러나 온도가 감소할수록 I-V측정에서 SBH는 선형적으로 감소하고 C-V측정에서 SBH는 온도에 따른 변화가 관찰되지 않았다. 이것은 낮은 온도에서 열이온 방출 이론을 따르지 않는다는 것을 나타낸다. 이것으로 재결합 전류를 고려하여 계산해 본 결과 I-V에서도 SBH의 변화가 관찰되지 않으므로 C-V측정과 일치됨을 보았다. 이런 상반된 결과를 가져오는 이유는 전류수송현상이 온도에 따라 변화하므로 생긴 것임을 알 수 있었다.
The Schottky barrier hieght(SBH) of Au/n-Si(100) were investigated by current-voltage(I-V) and capacitance voltage(C-V) measurement within a temperature range of l00K∼300K. The values of SBH at room temperature obtained from these two measurements were (0.79${\pm}$0.02)eV. The SBH obtained from the C-V measurement was temperature independent, while that obtained from the I-V measurement decreased linearly with decreasing temperature. This indicates that the Schottky diode has deviated from the thermionic emission theory at low-temperature, Thus, other current transport processes were considered and the contribution of recombination current was dominant at low temperature. We found that it leads to a lower SBH value. Thus, the conflicating results between C-V and I-V measurement were explained, C-V measurement is believed to yield mare reliable SBH values in present study since it is not affected by the current transport uncertainties.
