Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 4 Issue S2
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- Pages.163-169
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- 1995
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- 1225-8822(pISSN)
Investigation of Some Hard Coatings Synthesized by Ion Beam Assisted Deposition
- He, Jian-Li (Tsinghua University) ;
- Li, Wen-Zhi (Tsinghua University) ;
- He, Xial-Ming (Tsinghua University) ;
- Liu, Chang-Hong (Tsinghua University)
- Published : 1995.06.01
Abstract
Ion beam assisted deposition(IBAD) technique was used to synthesize hard coatings including diamond-like carbon(DLC), carbon nitride(CN) and metal-ceramic multilayered films. It was found that DLC films formed at low energy ion bombardment possess more
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