Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 4 Issue S2
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- Pages.95-99
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- 1995
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- 1225-8822(pISSN)
keV SURFACE MODIFICATION AND THIN FILM GROWTH
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Koh, Seok-Keun
(Korea Institute of Science and Technology) ;
- Choi, Won-Kook (Division of Ceramics, Korea Institute of Science and Technology) ;
- Youn, Young-Soo (Division of Ceramics, Korea Institute of Science and Technology) ;
- Song, Seok-Kyun (Division of Ceramics, Korea Institute of Science and Technology) ;
- Cho, Jun-Sik (Division of Ceramics, Korea Institute of Science and Technology) ;
- Kim, Ki-Hwan (Division of Ceramics, Korea Institute of Science and Technology) ;
- Jung, Hyung-Jin (Division of Ceramics, Korea Institute of Science and Technology)
- Published : 1995.06.01
Abstract
keV ion beam irradiatin for surface modification and thin film growth have been discussed. keV ion beam irradiation in reactive gas environment has been developed for improving wettability of polymer, and for enhancing adhesion to metal film, and adventages of the method have been reviewed. An epitaxial Cu film on Si(100) substrate has been grown by ionized cluster beam and changes of crystallinity and surface roughness have been discussed. Stoichiometric
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