Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Diamond Deposition by the R.F.Thermal Plasma at Atmospheric Pressure

대기압하의 고주파 열 플라즈마에 의한 다이아몬드 증착

  • Park, Hyun (Dept. of Chemical Engineering, College of Engineering, InHa University) ;
  • Park, Dong-Wha (Dept. of Chemical Engineering, College of Engineering, InHa University)
  • 박현 (인하대학교 공과대학 화학공학과) ;
  • 박동화 (인하대학교 공과대학 화학공학과)
  • Published : 1995.02.01
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Abstract

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