한국진공학회지 (Journal of the Korean Vacuum Society)
- 제4권S1호
- /
- Pages.145-150
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- 1995
- /
- 1225-8822(pISSN)
ECR-PECVD법을 사용한 ULSI DRAM 용 PZT 박막 제조
ECR-PECVD PZT Thin Films for the Charge Storage Cpacitor of ULSI DRAMs
초록
PZT thin films were fabricated on Pt/Ti/SiO2/Si substrates at
키워드