한국진공학회지 (Journal of the Korean Vacuum Society)
- 제4권S1호
- /
- Pages.92-96
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- 1995
- /
- 1225-8822(pISSN)
Application of Synchrotron Radiaton to Semiconductor Process and Surface Photochemical Reaction
- Lee, Ki-Ho (Department of Chemical Engineering Pohang University Of Science and Technology) ;
- Kim, Byoung-Youp (Department of Chemical Engineering Pohang University Of Science and Technology) ;
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Rhee, Shi-Woo
(Department of Chemical Engineering Pohang University Of Science and Technology)
- 발행 : 1995.02.01