Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 4 Issue S1
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- Pages.92-96
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- 1995
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- 1225-8822(pISSN)
Application of Synchrotron Radiaton to Semiconductor Process and Surface Photochemical Reaction
- Lee, Ki-Ho (Department of Chemical Engineering Pohang University Of Science and Technology) ;
- Kim, Byoung-Youp (Department of Chemical Engineering Pohang University Of Science and Technology) ;
- Rhee, Shi-Woo (Department of Chemical Engineering Pohang University Of Science and Technology)
- Published : 1995.02.01
Abstract
Keywords