한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)
- 제12권7호
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- Pages.92-98
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- 1995
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- 1225-9071(pISSN)
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- 2287-8769(eISSN)
고진공 운송계에서의 정밀 압력제어장치의 설게 및 성능시험
Design and Performance Evaluation of the Precision Pressure Control System for the High Vacuum Transport Module
초록
In the cluster tool, it is necessary to precisely control the vacuum pressure for the wafer transportation between transport module and cassette or process modules with the range of 1*10