Tribology and Lubricants
- 제11권1호
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- Pages.37-43
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- 1995
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- 2713-8011(pISSN)
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- 2713-802X(eISSN)
DOI QR Code
스퍼터링 증착조건이 TiN막의 마모특성에 미치는 영향
Effect of Sputtering Deposition Conditions on Tribological Characteristics of TiN films
초록
Sputtering parameters such as N$_{2}$ flow percentage and bias voltage in reactive TiN film deposition by RF magnetron sputtering system were selected to investigate the effects of sputtering deposition conditions on tribological characteristics of TiN films. Wear scar of the steel ball damaged by TiN films was measured by SEM to understand wear behavior of deposited TiN films. Crystallization and induced strain of TiN were detected by XRD. Wear mode changed from plastic to brittle with increasing N$_{2}$ ratio. Wear scar by sliding with TiN film deposited at around 27% N$_{2}$ ratio was maximum. The results indicate that bias voltage affects tribological behavior by formation of high density film and internal stress.
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