Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지

The Numerical Simulation of Ultrafine $SiO_2$ Particle Fabrication and Deposition by Using the Tube Furnace Reactor

튜브형 가열로 반응기를 이용한 초미립 $SiO_2$ 입자의 제조 및 증착에 대한 수치모사

  • 김교선 (강원대학교 공과대학 화학공학과) ;
  • 현봉수 (강원대학교 공과대학 화학공학과)
  • Published : 1995.11.01
Download PDF
⟨ Previous Next ⟩

Abstract

A numerical model for fabrication and deposition of ultrafine SiO2 particles were proposed in the simplified horizontal MCVD apparatus using tube furnace reactor. The model equations such as energy and mass balance equations and the 0th, 1st and 2nd moment balance equations of aerosols were considered in the reactor. The phenomena of SiCl4 chemical reaction, SiO2 particle formation and coagulation, diffusion and thermophoresis of SiO2 particles were included in the aerosol dynamic equation. The profiles of gas temperature, SiCl4 concentration and SiO2 particle volume were calculated for standard conditions. The concentrations, sizes and deposition efficiencies of SiO2 particles were calculated, changing the process conditions such as tube furnace setting temperature, total gas flow rate and inlet SiCl4 concentration.

Keywords

References

  1. Chem.Ind & Tech v.11 no.5 Optical Fiber Fabrication Technology Kim, K.S.
  2. Proc IEEE v.62 A New Technique for Preparation of Low-Loss and Graded Index Optical Fibers MacChesney, J.B;P.B. O'Connor;H.M. Presby
  3. J.Amer.Ceram.Soc v.63 Thermophoretic Deposition of Small Parthcles in the Modified Chemical Vapor Deposition (MCVD) Process Walker. K.L;F.T. Geyling;S.R. Nagel
  4. IEEE J.Guantum Electron v.QE-18 An Overview of the Modified Chemical Vapor Deposition Process and Performance Nagel, S.R;J.B. MacChesney;K.R. Walker
  5. J.Am.Ceram. Soc v.61 Kinetics of S₁Cl₄Oxidation Powers, D.R.
  6. J Phys.Chem. v.82 Chemical Kinetics of the Reaction of SiCl₄,SiBr₄ GeCl₄,PoCl₃ and BCl₃with Oxygen French, W G;L.J. Pace;V.A. Foertmeyer
  7. J.Colloid Interface Sci v.87 Thermophoretic Deposition in a Tube with a Variable Wall Temperature Weinberg, M.C
  8. AIChE J v.34 Manufacture of Optical Waveguide Preforms by Modified Chemical Vapor Deposition Kim. K.S;S.E. Pratsirus
  9. J Colloid Interface Sci v.124 Simultaneous Aerosol Nucleation,Condensation and Coagulation Pratsinis, S.E
  10. J.Aerosol Sci v.20 Particle Coagulation,Diffusion,and Thermophoresis in Laminar Tube Flow Pratsinis, S.E;K.S. Kim
  11. Hwahak Konghak v.33 no.2 A Study on Modeling of Tube Furnace Reactor for Manufacture of Ultrafine T1O2₂Powders Hyun, B.S;K.S. Kim
  12. Handbook of Heat Transfer(2nd ed) Kays. W.M;Perkins, H.C;Rohsenow. W.M(ed);Hartnett, J.P(ed);Ganic,E.N(ed)
  13. Smoke, Dust and Haze Friedlander, S.K
  14. Atmospheric Chemistry and Physics of Air Pollution Seinfeld, J.H
  15. Aerosol Technology Hinds,W.C
  16. Transport Phenomena Bird, R.B;W.E. Stewart;E.N. Lightfoot