The Korean Journal of Ceramics

The Korean Ceramic Society (한국세라믹학회)
권호 표지

Transmission Electron Microscopy Observation of (202) and (211) Twins in Monoclinic $ZrO_2$ Thin Film

  • Published : 1995.09.01
Download PDF
⟨ Previous Next ⟩

Abstract

Twins along(202) and (211) planes are observed in monoclinic $ZrO_2$ thin film, which is deposited on Si substrate by MOCVD at $350^{\circ}C$ and annealed at $1150^{\circ}C$ for 10 hours in air. These types of twin have not been reported in monoclinic $ZrO_2$. The twins seem to be originated from the two dimensional tensile stresses applied to the $ZrO_2$ thin film due to the different thermal expansions of $ZrO_2$ thin film and Si substrate.

Keywords

References

  1. Advances in Ceramics v.12 Phase Transformations in ZrO₂containing Ceramics:Ⅱ, The Martensitic Reaction in t-ZrO₂ M.Ruhle;A.H.Heuer;N.Claussen(Ed.);M.Ruhle(Ed.);A.H.Heuer(Ed.)
  2. Ph. D. Thesis, U. of Texas Electron Microscopy Study of the Microstructures in Oxygen-Deficient Pure Zirconia and Yttrium Doped Zirconia Y.M.Kim
  3. Advances in Ceramics v.12 Theory of Twinning and Transformation Modes in Zirconia M.A.Choudhry;A.G.Crocker;N.Claussen(Ed.);M.Ruhle(Ed.);A.H.Heuer(Ed.)
  4. J. Am. Ceram. Soc. v.66 no.2 Twin Boundaries in Monoclinic ZrO₂Particles Confined in a Mullite Matrix E.Bischoff;M.Ruhle
  5. J. Mater. Res. v.8 no.6 Deposition and Characterization of ZrO₂Thin Films on Silicon Substrate by MOCVD C.S.Hwang;H.J.Kim
  6. Introduction to Ceramics(2nd Ed.) W.D.Kingery;H.K.Bowen;D.R.Uhlmann
  7. Introduction to Ceramics(2nd Ed.) W.D.Kingery;H.K.Bowen;D.R.Uhlmann
  8. Handbook of Thin Film Technology R.Brown;L.I.Maissel(ed.);R.Glang(ed.)