Journal of Sensor Science and Technology (센서학회지)
- Volume 4 Issue 4
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- Pages.75-80
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- 1995
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
The Characteristics of $PbTiO_{3}-PbZrO_{3}-Pb(Ni_{1/3}Nb_{2/3})O_{3}$ Piezoelectric Thin Film Made by Sol-Gel Method
Sol-Gel 법으로 제작한 $PbTiO_{3}-PbZrO_{3}-Pb(Ni_{1/3}Nb_{2/3})O_{3}$ 압전박막의 특성
- Yoon, Wha-Joong (Dept. of Physics, Chungnam Nat'l Univ.) ;
- Lim, Moo-Yeol (Dept. of Physics, Chungnam Nat'l Univ.) ;
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Koo, Kyung-Wan
(Dept. of Electronics Engineering, Young Dong Institute of Technology)
- Published : 1995.11.30
Abstract
In order to fabricate the piezoelectric thin film of the PZT-PNN ternary compound, the metal alkoxides were used as starting materials. The electrical and crystalline properties of the thin film were evaluated. The X- RD study shows that the crystallization of the film is optimized at
금속 alkoxide를 출발물질로 PZT-PNN 3성분계 압전박막을 제작하여, 박막의 결정성과 전기적 특성을 평가하였다. 박막의 X-RD 분석결과
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