Bulletin of the Korean Chemical Society

Korean Chemical Society (대한화학회)
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Determination of Trace Impurities in ULSI Grade Silane

  • Han, Ju-Tak (Daesung Cryogenic Research Instiute, Daesung Sanso Co., Ltd.) ;
  • Park, Byung-Eon (Daesung Cryogenic Research Instiute, Daesung Sanso Co., Ltd.) ;
  • Park, Doo-Seon (Daesung Cryogenic Research Instiute, Daesung Sanso Co., Ltd.) ;
  • Son, Moo-Ryong (Daesung Cryogenic Research Instiute, Daesung Sanso Co., Ltd.) ;
  • Manabe, Takeshi (Electronics Technology Center Electronic Division, TEISAN K. K.)
  • Published : 1994.11.20
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References

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