스테이지 구동방식 주사형정전용량 현미경

Scanning Capacitance Microscope by Stage Driving

In this work a scanning capacitance microscopy(SCaM) by stage driving is proposed and presented some of the experimental results.SCaM is a microscope which scans a surface of materials mechanically in two or two point five dimensions by a capacitance probe with a few tenth $\mu\textrm{m}$ ize tip, and display images of the surface shape or capacitive distribution. The present target of the SCaM is 0.1$\mu\textrm{m}$ resolution power which exceeds that of optical microscope. This will become a powerful tool for inspecting ULSI pattern etched by X-ray biological data etc. The experimental system is composed based on a VHD video disk which captures the capacitance changes of the video disk surface and converts it into video signal.