전자공학회논문지A (Journal of the Korean Institute of Telematics and Electronics A)
- 제31A권4호
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- Pages.84-91
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- 1994
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- 1016-135X(pISSN)
Compact ECR plasma장치의 제작 및 특성 연구
Study on the Fabrication and Characterization of Compact ECR Plasma System
초록
A compact electron cyclotron resonance(ECR) plasma system composed of a microwave generator and a magnet coil was fabricated. A Langmuir single probe was used to investigate the plasma characteristics of the system through I-V measurements. The performance of the compact ECR plasma system was tested for the case of silicon etching reaction with
키워드