Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Characteristics of Ar Plasma Excited by Helicon Wave

Helicon wave 에 의하여 여기된 Ar 플라즈마 특성

  • 김태영 (서울대학교 원자핵공학과) ;
  • 정기형 (서울대학교 원자핵공학과) ;
  • 이승학 (중앙대학교 물리학과) ;
  • 정재국 (중앙대학교 물리학과)
  • Published : 1994.12.01
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Abstract

This work concerns a research for helicon wave plasma generators with applications to materials pro-cessing. For this end, helicon wave plasma source has been designed, constructed and tested. High density plasma was successfully produced and diagnosed with Langmuir probe. The measured maximum plasma de-nsity in this work was $10^{11}cm{-3}$ with 295 gauss of magnetic field and electron temperature was about 3.5eV. The uniformity of plasma densities in the radial direction was excellent with 160 gauss of magnetic field on the cross section which is 10cm apart from the edge of the exciting coil.

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